Over 75 EpiTUNE II Metrology systems have shipped on AIXTRON MOCVD Reactors worldwide. The EpiTUNE® II in-situ metrology systems in based on Luxtrons patented Ripple® technology.
(PRWEB) May 27, 2004 -- Luxtron Corporation and AIXTRON AG announce that over 75 EpiTUNE® II in-situ metrology systems, based on Luxtrons patented Ripple® technology, have been shipped on AIXTRON MOCVD reactors. This includes multiple orders to major customers in Taiwan and the USA.
The EpiTUNE® II in-situ metrology system is a standard feature on all AIXTRON Planetary Reactorsâ for production of GaN-based optical devices. EpiTUNE® II provides precise process control of challenging processes such as GaN based blue lasers, LEDs and laser diodes. In addition to measuring the true surface temperature, this real-time monitoring tool also provides simultaneous reflectivity measurements for valuable in- situ film growth characteristics. Luxtrons Ripple® technology offers unparalleled precision in temperature measurements over a range of 400oC to 1600oC, making the EpiTUNE® II ideal for GaN-, GaAs-, InP- and other III-V processes.
AIXTRON´s large-scale Planetary Reactor® systems, offering superior Cost of Ownership, have lead to the worldwide acceptance of MOCVD as the leading deposition technology for production of optoelectronic devices. AIXTRONs MOCVD reactors with the EpiTUNE® II system represents the industry standard for production of LEDs and Lasers based on III-V compounds. AIXTRONs Planetary Reactors® are used as production tools at most of the major LED manufacturers, including LumiLeds, Epistar, Forepi, Arima, Epitech, UEC, Tekcore, Samsung and many others.
About AIXTRON AG:
AIXTRON is, as verified by an independent market research institute, the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communication systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG (FSE: AIX ISIN DE0005066203) is listed in the Prime Standard and Tec-DAX of the German Stock Exchange (Deutsche Börse) and is included in the MSCI World Index.
About LUXTRON Corporation:
Luxtron Corporation is a leading supplier of in-situ fiber optic thermometry solutions for the semiconductor, optoelectronics, medical and utility industries. Its products give users the ability to monitor processes and measure temperature in harsh environments with extraordinary accuracy. Luxtron provides yield-enhancing products for plasma processing (etch and deposition), MOCVD, MBE, epitaxy and rapid thermal processing (RTP) and diffusion processes. Luxtron headquarters, featuring ISO9001:2000 certified manufacturing facilities, are located in Santa Clara, California. More information about Luxtron Corporation may be obtained by visiting our website at www.luxtron.com.
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