Rohm and Haas Electronic Materials, CMP Technologies, a leader and innovator in chemical mechanical planarization technology for the global semiconductor industry, today formally introduced the EcoVision(TM) 4000 ultra-low defectivity performance CMP pad designed specifically for advanced copper barrier processes for 45 nm technology nodes and beyond. The EcoVision 4000 pad is the latest addition to Rohm and Haas' VisionPad product line, which offers highly specialized CMP solutions for advanced semiconductor manufacturing processes.
PHOENIX & HSINCHU, Taiwan (BusinessWire EON) September 12, 2007 --
Rohm and Haas Electronic Materials, CMP Technologies, a leader and
innovator in chemical mechanical planarization technology for the global
semiconductor industry, today formally introduced the EcoVision™
4000 ultra-low defectivity performance CMP pad designed specifically for
advanced copper barrier processes for 45 nm technology nodes and beyond.
The EcoVision 4000 pad is the latest addition to Rohm and Haas’
VisionPad product line, which offers highly specialized CMP solutions
for advanced semiconductor manufacturing processes.
“As customers switch to advanced processes and
nodes, we offer products designed for their specific polishing needs,”
explained Cathie Markham, vice president of technology for Rohm and Haas
Electronic Materials, CMP Technologies. “The
EcoVision 4000 pad is representative of this shift towards application
specific pads. Throughout our entire VisionPad platform, we provide
customers with the best and most cost effective solutions for their
specific CMP process requirements.”
The EcoVision 4000 CMP pad features a unique design and chemistry
allowing customers to achieve a significant reduction in cost of
ownership with highly consistent performance over the product’s
lifetime. The lifetime of the EcoVision 4000 pad demonstrates a
significant improvement over existing soft pads for copper barrier
applications and is comparable to hard pads such as the
industry-standard IC1000™ pad, used for bulk
copper removal CMP applications. This allows users to change the pads on
all platens at the same time, minimizing the costs associated with
downtime and qualification processes.
The pad’s innovative manufacturing process
produces a surface that results in increased contact area between the
pad and the wafer. This reduces defects and improves die yields by
minimizing scratches and chatter marks across the wafer resulting in best–of-class
defectivity performance. Unlike soft pads, the EcoVision 4000 pad is
conditioned, allowing for pad surface regeneration to achieve optimal
polishing results that are consistent throughout the pad’s
life as well as from pad to pad.
The EcoVision 4000 pad is currently available for customer sampling in
multiple product configurations, and will be available commercially in
Q4 of this year. The product will be featured at SEMICON Taiwan from
September 12-14 in Hall 1 Booth 1252.
About Rohm and Haas Electronic Materials
Rohm and Haas Electronic Materials develops and delivers innovative
material solutions and processes to the electronic and optoelectronic
industries. Focused on the circuit board, semiconductor manufacturing,
advanced packaging, and flat panel display industries, its products and
technologies are integral elements in electronic devices around the
world.
The CMP Technologies business has been a leader and innovator in
polishing technology for the global semiconductor industry since 1969.
CMP Technologies products include polishing pads, conditioners and
slurries. CMP Technologies maintains operations throughout the world,
including manufacturing facilities in Newark, Delaware, Hsinchu, Taiwan
and in the Mie and Kyoto prefectures in Japan. Additional information is
available at http://www.rohmhaas.com.
About Rohm and Haas Company
Leading the way since 1909, Rohm and Haas (NYSE:ROH) is a global pioneer
in the creation and development of innovative technologies and solutions
for the specialty materials industry. The company’s
technologies are found in a wide range of markets including: Building
and Construction, Electronics, Food and Retail, Household and Personal
Care, Industrial Process, Packaging, Paper, Transportation and Water.
Our innovative technologies and solutions help to improve life everyday,
around the world. Based in Philadelphia, PA, the company generated
annual sales of approximately $8.2 billion in 2006. Visit www.rohmhaas.com
for more information. Imagine the possibilities™.
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